Semiconductor Device Processing & Measuring Lab
National Tsing Hua University, Department of Engineering and System Science
Journal Papers
Improved Electrical Characteristics of Bulk FinFETs With SiGe Super-Lattice-Like Buried Channel
IEEE Electron Device Letters 2019
Yan-Lin Li, Kuei-Shu Chang-Liao, Chen-Chien Lia, Hao-Ting Feng, Chia-Hung Kao, Chun-Yuan Chen, Dun-Bao Ruan, Yi-Ju Chenb, Kai-Shin Lic, Guang-Li Luo
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Effects of fluorine based double plasma treatment on electrical and reliability characteristics of Ge pMOSFETs
Microelectronic Engineering 2019
Dun-Bao Ruan, Kuei-Shu Chang-Liao, Ji-Syuan Li, Shih-Han Yi, Guan-Ting Liu, Po-Chen Chiu, Yan-Lin Li
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Radiation effects and reliability characteristics of Ge pMOSFETs
Microelectronic Engineering 2019
Dun-Bao Ruan, Kuei-Shu Chang-Liao, Zi-Qin Hong, Jiayi Huang, Shih-Han Yi, Guan-Ting Liu, Po-Chen Chiu, Yan-Lin Li
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Conference Papers
High-k Dielectric and Interface Engineering for High Performance Si/Ge MOS and FinFETs
IEEE EDS France Chapter Distinguished Lecture 2019
Kuei-Shu Chang-Liao
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Improved Electrical Characteristics of SOI FinFET with HfO2/ZrO2/HfO2 Gate Stack
EUROSOI-ULIS 2019
Yan-Lin Li, Kuei- Shu Chang-Liao, Dun-Bao Ruan, Shang-Hua Hsu, Bo-Xun Lu, Yu-Ting Kuo, Ying-Zhuang Chien, Kuan-Yu Lai, and Yao-Jen Lee
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Gate Stack Engineering for Ge MOS and FinFETs
IEEE ED Indian Institute of Technology - Roorkee Student Branch Chapter 2019
Kuei-Shu Chang-Liao
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High Performance Si/Ge MOS and FinFETs by Engineering Gate Stack
IEEE Singapore RS/EPS/EDS Chapter Distinguished Lectures 2019
Kuei-Shu Chang-Liao
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Enhanced Electrical and Reliability Characteristics of Ge pMOSFETs by Fluorine Followed with Oxygen and Nitrogen Plasma Treatment
21th Conference of Insulating Films on Semiconductors 2019
Guan-Ting Liu, Kuei-Shu Chang-Liao, Dun-Bao Ruan, Ji-Syuan Li, Shih-Han Yi, Zi-Qin Hong, Po-Chen Chiu, Yan-Lin Li
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Effects of Nitrogen Content in Interfacial Layer on Ge nMOSFET
21th Conference of Insulating Films on Semiconductors 2019
Po-Chen Chiu, Kuei-Shu Chang-Liao, Dun-Bao Ruan, Shih-Han Yi, Zi-Qin Hong, Guan-Ting Liu, Yan-Lin Li
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Radiation Effects and Reliability Characteristics of Ge pMOSFETs
21th Conference of Insulating Films on Semiconductors
Zi-Qin Hong, Kuei-Shu Chang-Liao, Dun-Bao Ruan, Shih-Han Yi, Po-Chen Chiu, Guan-Ting Liu, and Yan-Lin Li
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High Performance Ge pMOSFET with Engineering Interfacial Layer and Microwave Annealing
IEEE 9th International Nanoelectronics Conferences (INEC) 2019
Kuei-Shu Chang-Liao
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Effects of Plasma Nitrided Trilayer High-k Gate Dielectric on Electrical Characteristics of FinFET
International Conference on Solid State Devices and Materials 2019
Kuan-Yu Lai, Kuei- Shu Chang-Liao, Yan-Lin Li, Dun-Bao Ruan, Shang-Hua Hsu, Ying-Zhuang Chien, and Bo-Xun Lu
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Impact of Low Temperature Formed GeOx/Al2O3 Tunneling Layer on Reliability of Junctionless Poly-Ge Charge-Trapping Flash Memory Device
International Conference on Solid State Devices and Materials 2019
Te-Yu Chiang, Kuei-Shu Chang-Liao, Hsin-Kai Fang, Po-Yao Lin, Wen-Hsien Huang, Chang-Hong Shen and Jia-Min Shieh
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Enhanced Electrical Characteristics of FinFETs with Strained SiGe Super-Lattice Channel
International Conference on Solid State Devices and Materials 2019
Bo-Xun Lu, Kuei- Shu Chang-Liao, Yan-Lin Li, Dun-Bao Ruan, Shang-Hua Hsu, Ying-Zhuang Chien, Kuan-Yu Lai
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High Performance 3D Flash Memory Devices with Dielectric Engineering
IEEE Electron Devices Society Chengdu Chapter Distinguished Lecturer 2019
Kuei-Shu Chang-Liao
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Effects of ZrON and CF4 Plasma Treatment in Gate Stack on Electrical Characteristics of FinFETs
2019 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology
Ying-Zhuang Chien, Kuei- Shu Chang-Liao, Yan-Lin Li, Dun-Bao Ruan, Shang-Hua Hsu, Kuan-Yu Lai, and Bo-Xun Lu
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Improved Erasing Speed of Poly-Si Gate-All-Around Junctionless Charge-Trapping Flash Memory Devices with ZrO2 in Stacked Trapping Layer
2019 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology
Ping-Shun Ding, Kuei-Shu Chang-Liao, Hsin-Kai Fang, Chia-Hsin Cheng, Wen-Hsien Huang, Chang-Hong Shen and Jia-Min Shieh
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Notable Difference between Rapid-Thermal and Microwave Annealings on Ge pMOSFETs
2019 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology
Yu-Ting Kuo, Kuei-Shu Chang-Liao, Ying-Zhuang Chien, Ping-Shun Ding, Shi-Han Yi
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Gate Dielectric Quality Enhancement for Ge pMOSFET by In-situ Low Temperature Treatment in Atomic Layer Deposition Process
2019 International Thin Film Conference
Dun-Bao Ruan, Kuei-Shu Chang-Liao*, Ji-Syuan Li, Shih-Han Yi
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Engineering HfN Interface Layer in Gate Stack toward High Performance Ge nFETs
50th IEEE Semiconductor Interface Specialist Conference (SISC) 2019
Chih-Wei Liu, Dun-Bao Ruan, Kuei-Shu Chang-Liao, Shih-Han Yi, Hsin-I Yeh, Wen-Yen Hsu and Y.J. Lee
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