Semiconductor Device Processing & Measuring Lab
National Tsing Hua University, Department of Engineering and System Science
Journal Papers
Metal Migration Induced Breakdown from Gate Contact in Bulk FinFET Devices
2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
Xin Yang; Yihong Qing; Kuei-Shu Chang-Liao; Yuchong Qiao; Chaolun Wang; Zhiwei Liu; Luoyong Li; Chihang Tsai; Yongren Wu; Yazhen Xie; Weisong Yu; Xing Wu
Bandgap-Engineered Tunneling Layer on Operation Characteristics of Poly-Ge Charge-Trapping Flash Memory Devices
2021 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)
Jung-En Tsai; Kuei-Shu Chang-Liao; Hsin-Kai Fang
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Enhanced Electrical Characteristics of Ge nMOSFET by Supercritical Fluid CO2 Treatment With H2O2 Cosolvent
IEEE Electron Device Letters 2021
Dun-Bao Ruan; Kuei-Shu Chang-Liao; Guan-Ting Liu; Yu-Chuan Chiu; Kai-Jhih Gan; Po-Tsun Liu
Electrical and Reliability Characteristics of FinFETs With High-k Gate Stack and Plasma Treatments
IEEE Transactions on Electron Devices 2021
Yan-Lin Li; Kuei-Shu Chang-Liao; Chen-Chien Li; Chin-Hsiu Huang; Shang-Fu Tsai; Cheng-Yuan Li; Zi-Qin Hong; Hsin-Kai Fang
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Conference Papers
High-k Dielectric and Interface Engineering for High Performance Si/Ge MOS and FinFETs
IEEE EDS Delhi Chapter, Distinguished Lecturer 2019
Kuei-Shu Chang-Liao
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Improved Electrical Characterisics of pGe MOS Device by Hydrogen Plasma Treated GeO Interfacial Layer
2020 Silicon Nanoelectronics Workshop
Dun-Bao Ruan, Kuei-Shu Chang-Liao, Shih-Han Yi, Hsin-I Yeh, and Guan-Ting Liu
Process development of CMOS TFTs for monolithic 3D-IC applications
238th Meeting of The Electrochemical Society (ECS) 2020
K.S. Chang-Liao, D.B. Ruan, P.C. Chiu
Enhanced Reliability and Uniformity for Ge pMOSFET with Low Temperature Supercritical Fluid Treatment
51th IEEE Semiconductor Interface Specialist Conference (SISC) 2020
Dun-Bao Ruan, Kuei-Shu Chang-Liao, Ji-Syuan Li, Zi-Qin Hong, Guan-Ting Liu, and Po-Tsun Liu
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