top of page
Semiconductor Device Processing & Measuring Lab
National Tsing Hua University, Department of Engineering and System Science
Basic Operation Mode for CTF (P/E Operations)
Programming operation
1.Electrons tunnel through SiO2 into charge-trapping layer and are trapped.
2.Electrons transporting in charge-trapping layer tunnel through blocking layer
Erasing operation
1.Holes inject to charge-trapping layer and recombine with trapped electrons.
2.Trapped electrons detrap by tunneling or emission mechanisms.
3.Erase speed can be suppressed by electron back tunneling.
â—ŽHfO2/SiN stacked trapping layer
â—ŽHfO2/HfAlO stacked trapping layer
â—ŽBandgap-engineered trapping layer is achieved by multi-layer stack.
bottom of page