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Semiconductor Device Processing & Measuring Lab

National Tsing Hua University, Department of Engineering and System Science

Basic Operation Mode for CTF (P/E Operations)

Programming operation
1.Electrons tunnel through SiO2 into charge-trapping layer and are trapped.
2.Electrons transporting in charge-trapping layer tunnel through blocking layer

Erasing operation
1.Holes inject to charge-trapping layer and recombine with trapped electrons.
2.Trapped electrons detrap by tunneling or emission mechanisms.
3.Erase speed can be suppressed by electron back tunneling.

â—ŽHfO2/SiN stacked trapping layer

â—ŽHfO2/HfAlO stacked trapping layer

â—ŽBandgap-engineered trapping layer is achieved by multi-layer stack.
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